Growth dynamics of Si1-yCy and Si1-x-yGexCy on Si(001) surface from disilane, germane, and methylsilane
10.1063/1.1519734
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/107055 |
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| Institution: | National University of Singapore |