Roughening behavior in Si/SiGe heterostructures under O2 + bombardment
10.1016/S0168-583X(03)01711-7
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sg-nus-scholar.10635-1131012024-11-15T07:05:23Z Roughening behavior in Si/SiGe heterostructures under O2 + bombardment Lau, G.S. Tok, E.S. Liu, R. Wee, A.T.S. Zhang, J. INSTITUTE OF ENGINEERING SCIENCE PHYSICS MATERIALS SCIENCE 10.1016/S0168-583X(03)01711-7 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 215 1-2 76-82 NIMBE 2014-11-28T09:12:01Z 2014-11-28T09:12:01Z 2004-01 Article Lau, G.S., Tok, E.S., Liu, R., Wee, A.T.S., Zhang, J. (2004-01). Roughening behavior in Si/SiGe heterostructures under O2 + bombardment. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 215 (1-2) : 76-82. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01711-7 0168583X http://scholarbank.nus.edu.sg/handle/10635/113101 000188400400010 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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10.1016/S0168-583X(03)01711-7 |
| author2 |
INSTITUTE OF ENGINEERING SCIENCE |
| author_facet |
INSTITUTE OF ENGINEERING SCIENCE Lau, G.S. Tok, E.S. Liu, R. Wee, A.T.S. Zhang, J. |
| format |
Article |
| author |
Lau, G.S. Tok, E.S. Liu, R. Wee, A.T.S. Zhang, J. |
| spellingShingle |
Lau, G.S. Tok, E.S. Liu, R. Wee, A.T.S. Zhang, J. Roughening behavior in Si/SiGe heterostructures under O2 + bombardment |
| author_sort |
Lau, G.S. |
| title |
Roughening behavior in Si/SiGe heterostructures under O2 + bombardment |
| title_short |
Roughening behavior in Si/SiGe heterostructures under O2 + bombardment |
| title_full |
Roughening behavior in Si/SiGe heterostructures under O2 + bombardment |
| title_fullStr |
Roughening behavior in Si/SiGe heterostructures under O2 + bombardment |
| title_full_unstemmed |
Roughening behavior in Si/SiGe heterostructures under O2 + bombardment |
| title_sort |
roughening behavior in si/sige heterostructures under o2 + bombardment |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113101 |
| _version_ |
1821211128957501440 |