Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides
10.1016/S0921-5107(01)00842-X
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2014
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sg-nus-scholar.10635-1131152023-10-26T21:02:18Z Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides Zhang, J. Woods, N.J. Breton, G. Price, R.W. Hartell, A.D. Lau, G.S. Liu, R. Wee, A.T.S. Tok, E.S. MATERIALS SCIENCE INSTITUTE OF ENGINEERING SCIENCE PHYSICS Epitaxial Heterojunction Hydride 10.1016/S0921-5107(01)00842-X Materials Science and Engineering B: Solid-State Materials for Advanced Technology 89 1-3 399-405 MSBTE 2014-11-28T09:12:12Z 2014-11-28T09:12:12Z 2002-02-14 Conference Paper Zhang, J., Woods, N.J., Breton, G., Price, R.W., Hartell, A.D., Lau, G.S., Liu, R., Wee, A.T.S., Tok, E.S. (2002-02-14). Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 89 (1-3) : 399-405. ScholarBank@NUS Repository. https://doi.org/10.1016/S0921-5107(01)00842-X 09215107 http://scholarbank.nus.edu.sg/handle/10635/113115 000174015300085 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Epitaxial Heterojunction Hydride |
| spellingShingle |
Epitaxial Heterojunction Hydride Zhang, J. Woods, N.J. Breton, G. Price, R.W. Hartell, A.D. Lau, G.S. Liu, R. Wee, A.T.S. Tok, E.S. Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides |
| description |
10.1016/S0921-5107(01)00842-X |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Zhang, J. Woods, N.J. Breton, G. Price, R.W. Hartell, A.D. Lau, G.S. Liu, R. Wee, A.T.S. Tok, E.S. |
| format |
Conference or Workshop Item |
| author |
Zhang, J. Woods, N.J. Breton, G. Price, R.W. Hartell, A.D. Lau, G.S. Liu, R. Wee, A.T.S. Tok, E.S. |
| author_sort |
Zhang, J. |
| title |
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides |
| title_short |
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides |
| title_full |
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides |
| title_fullStr |
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides |
| title_full_unstemmed |
Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides |
| title_sort |
growth mechanisms in thin film epitaxy of si/sige from hydrides |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113115 |
| _version_ |
1781789168890806272 |