Study of copper diffusion into tantalum and tantalum diffusion into copper

• Main Authors: Loh, S.W., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S.
• Other Authors: INSTITUTE OF ENGINEERING SCIENCE
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/113118
• Institution: National University of Singapore

International Journal of Modern Physics B