Study of copper diffusion into tantalum and tantalum diffusion into copper

by Loh, S.W., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S.
Published 2014

Investigation of metal-organic chemical vapor deposited copper diffusion in tantalum after annealing

by Loh, S.W., Zhang, D.H., Liu, R., Li, C.Y., Wee, A.T.S.
Published 2014

Study of copper diffusion into tantalum nitride (Ta2N) by rapid thermal annealing (RTA)

by Loh, S.W., Zhang, D.H., Liu, R., Li, C.Y., Wee, A.T.S.
Published 2014

Study of copper diffusion into Ta and TaN barrier materials for MOS devices

by Loh, S.W., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S.
Published 2014

Study of interactions between α-Ta films and SiO2 under rapid thermal annealing

by Yuan, Z.L., Zhang, D.H., Li, C.Y., Prasad, K., Tan, C.M.
Published 2014

Thermal stability of Cu/α-Ta/SiO2/Si structures

by Yuan, Z.L., Zhang, D.H., Li, C.Y., Prasad, K., Tan, C.M.
Published 2014

Thermal stability of Cu/Ta/ultra low k porous polymer structures for multilevel interconnects

by Zhang, D.H., Yang, L.Y., Li, C.Y., Liu, R., Wee, A.T.S., Foo, P.D.
Published 2014

Comparative study of Ta and TaN(N) in the barrier/ultra low k structures for deep submicron integrated circuits

by Yang, L.Y., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S., Foo, P.D.
Published 2014

Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM

by Teh, W.H., Koh, L.T., Chen, S.M., Xie, J., Li, C.Y., Foo, P.D.
Published 2014

Characterization of Cu/Ta/ultra low-k porous polymer structures for multilevel interconnects

by Yang, L.Y., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S., Foo, P.D.
Published 2014

Comparative investigation of TaN and SiCN barrier layer for Cu/ultra low k integration

by Yang, L.Y., Zhang, D.H., Li, C.Y., Liu, R., Lu, P.W., Foo, P.D., Wee, A.T.S.
Published 2014

Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures

by Zhang, D.H., Loh, S.W., Li, C.Y., Foo, P.D., Xie, J., Liu, R., Wee, A.T.S., Zhang, L., Lee, Y.K.
Published 2014

A mass vaccination campaign targeting adults and children to prevent typhoid fever in Hechi; Expanding the use of Vi polysaccharide vaccine in Southeast China: A cluster-randomized...

by Yang, J, Acosta, C.J, Si, G.-A, Zeng, J, Li, C.-Y, Liang, D, Ochiai, R.L, Page, A.-L, Danovaro-Holliday, M.C, Zhang, J, Zhou, B.-D, Liao, H.-Z, Wang, M.-L, Tan, D.-M, Tang, Z.-Z, Gong, J, Park, J.-K, Ali, M, Ivanoff, B, Liang, G.-C, Yang, H.-H, Pang, T, Xu, Z.-Y, Donner, A, Galindo, C.M, Dong, B.-Q, Clemens, J.D
Published 2020