Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics
10.1116/1.2749526
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Main Authors: | Darmawan, P., Lee, P.S., Setiawan, Y., Lai, J.C., Yang, P. |
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其他作者: | SINGAPORE SYNCHROTRON LIGHT SOURCE |
格式: | Article |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/116652 |
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