The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition

10.1063/1.4798928

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Bibliographic Details
Main Authors: Wong, J., Yeghikyan, D., Kherani, N.P.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Conference or Workshop Item
Published: 2016
Online Access:http://scholarbank.nus.edu.sg/handle/10635/128760
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Institution: National University of Singapore