The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition
10.1063/1.4798928
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Main Authors: | Wong, J., Yeghikyan, D., Kherani, N.P. |
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Other Authors: | SOLAR ENERGY RESEARCH INST OF S'PORE |
Format: | Conference or Workshop Item |
Published: |
2016
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/128760 |
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Institution: | National University of Singapore |
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