The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition
10.1063/1.4798928
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sg-nus-scholar.10635-1287602024-11-11T12:13:40Z The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition Wong, J. Yeghikyan, D. Kherani, N.P. SOLAR ENERGY RESEARCH INST OF S'PORE 10.1063/1.4798928 Journal of Applied Physics 113 13 - JAPIA 2016-10-19T08:44:51Z 2016-10-19T08:44:51Z 2013-04-07 Conference Paper Wong, J., Yeghikyan, D., Kherani, N.P. (2013-04-07). The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition. Journal of Applied Physics 113 (13) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4798928 00218979 http://scholarbank.nus.edu.sg/handle/10635/128760 000317238000005 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.4798928 |
| author2 |
SOLAR ENERGY RESEARCH INST OF S'PORE |
| author_facet |
SOLAR ENERGY RESEARCH INST OF S'PORE Wong, J. Yeghikyan, D. Kherani, N.P. |
| format |
Conference or Workshop Item |
| author |
Wong, J. Yeghikyan, D. Kherani, N.P. |
| spellingShingle |
Wong, J. Yeghikyan, D. Kherani, N.P. The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition |
| author_sort |
Wong, J. |
| title |
The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition |
| title_short |
The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition |
| title_full |
The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition |
| title_fullStr |
The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition |
| title_full_unstemmed |
The augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition |
| title_sort |
augmented saddle field discharge characteristics and its applications for plasma enhanced chemical vapour deposition |
| publishDate |
2016 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/128760 |
| _version_ |
1821226238709071872 |