Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices
Proceedings of SPIE - The International Society for Optical Engineering
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sg-nus-scholar.10635-1341422017-01-01T14:54:36Z Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices Lahiri, S.K. Lim, C.W. Chan, L. ELECTRICAL ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 3316 2 957-966 PSISD 2016-12-20T08:43:56Z 2016-12-20T08:43:56Z 1998 Conference Paper Lahiri, S.K., Lim, C.W., Chan, L. (1998). Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices. Proceedings of SPIE - The International Society for Optical Engineering 3316 (2) : 957-966. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/134142 NOT_IN_WOS |
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National University of Singapore |
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Singapore |
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ScholarBank@NUS |
| description |
Proceedings of SPIE - The International Society for Optical Engineering |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lahiri, S.K. Lim, C.W. Chan, L. |
| format |
Conference or Workshop Item |
| author |
Lahiri, S.K. Lim, C.W. Chan, L. |
| spellingShingle |
Lahiri, S.K. Lim, C.W. Chan, L. Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices |
| author_sort |
Lahiri, S.K. |
| title |
Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices |
| title_short |
Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices |
| title_full |
Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices |
| title_fullStr |
Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices |
| title_full_unstemmed |
Titanium self-aligned silicide process fabrication issues for deep sub-micron CMOS devices |
| title_sort |
titanium self-aligned silicide process fabrication issues for deep sub-micron cmos devices |
| publishDate |
2016 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/134142 |
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1681097612963348480 |