IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS

IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS

Master's

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Bibliographic Details
Main Author: HANDRA
Other Authors: SINGAPORE-MIT ALLIANCE
Format: Theses and Dissertations
Published: 2019
Subjects:
Low-k dielectrics
TDDB
Process variation (Wafer's Center and Edge)
Spacing adjusted voltage stress
Equal e-field
Online Access:https://scholarbank.nus.edu.sg/handle/10635/153914
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Institution: National University of Singapore

Internet

https://scholarbank.nus.edu.sg/handle/10635/153914

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