IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS

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Bibliographic Details
Main Author:	HANDRA
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	Low-k dielectrics TDDB Process variation (Wafer's Center and Edge) Spacing adjusted voltage stress Equal e-field
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153914
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153914
record_format	dspace
spelling	sg-nus-scholar.10635-1539142024-10-26T00:13:16Z IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS HANDRA SINGAPORE-MIT ALLIANCE Gan Chee Lip Galor Zhang Low-k dielectrics TDDB Process variation (Wafer's Center and Edge) Spacing adjusted voltage stress Equal e-field Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 1. Ass. Prof. Gan Chee Lip, SMA Fellow, NTU. 2. Dr. Galor Zhang, Principal Engineer, Chartered Semiconductor Manufacturing Co. 2019-05-09T08:15:41Z 2019-05-09T08:15:41Z 2008 Thesis HANDRA (2008). IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153914 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Low-k dielectrics TDDB Process variation (Wafer's Center and Edge) Spacing adjusted voltage stress Equal e-field
spellingShingle	Low-k dielectrics TDDB Process variation (Wafer's Center and Edge) Spacing adjusted voltage stress Equal e-field HANDRA IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE HANDRA
format	Theses and Dissertations
author	HANDRA
author_sort	HANDRA
title	IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS
title_short	IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS
title_full	IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS
title_fullStr	IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS
title_full_unstemmed	IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS
title_sort	imd tddb (time dependence dielectric breakdown) on low-k dieletrics
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153914
_version_	1821226406030344192

IMD TDDB (TIME DEPENDENCE DIELECTRIC BREAKDOWN) ON LOW-k DIELETRICS

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