Effective optimization of surface passivation on porous silicon carbide using atomic layer deposited Al2O3
10.1039/c6ra27281a
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Main Authors: | Lu, W, Iwasa, Y, Ou, Y, Jinno, D, Kamiyama, S, Petersen, P.M, Ou, H |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2020
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Subjects: | |
Online Access: | https://scholarbank.nus.edu.sg/handle/10635/178741 |
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Institution: | National University of Singapore |
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