Effective optimization of surface passivation on porous silicon carbide using atomic layer deposited Al2O3

10.1039/c6ra27281a

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Bibliographic Details
Main Authors: Lu, W, Iwasa, Y, Ou, Y, Jinno, D, Kamiyama, S, Petersen, P.M, Ou, H
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2020
Subjects:
Online Access:https://scholarbank.nus.edu.sg/handle/10635/178741
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Institution: National University of Singapore

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