THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES
Master's
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2020
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sg-nus-scholar.10635-1821582020-11-19T13:57:20Z THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES DAVID KOH KHAR ANN ELECTRICAL ENGINEERING CHUA SOO JIN Master's MASTER OF ENGINEERING 2020-10-30T06:36:58Z 2020-10-30T06:36:58Z 1996 Thesis DAVID KOH KHAR ANN (1996). THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/182158 CCK BATCHLOAD 20201023 |
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National University of Singapore |
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Singapore Singapore |
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ScholarBank@NUS |
description |
Master's |
author2 |
ELECTRICAL ENGINEERING |
author_facet |
ELECTRICAL ENGINEERING DAVID KOH KHAR ANN |
format |
Theses and Dissertations |
author |
DAVID KOH KHAR ANN |
spellingShingle |
DAVID KOH KHAR ANN THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES |
author_sort |
DAVID KOH KHAR ANN |
title |
THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES |
title_short |
THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES |
title_full |
THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES |
title_fullStr |
THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES |
title_full_unstemmed |
THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES |
title_sort |
influence of a layer of oxide on electromigration performance of al/cu/si metal lines |
publishDate |
2020 |
url |
https://scholarbank.nus.edu.sg/handle/10635/182158 |
_version_ |
1686109158808485888 |