THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES

Master's

Saved in:
Bibliographic Details
Main Author: DAVID KOH KHAR ANN
Other Authors: ELECTRICAL ENGINEERING
Format: Theses and Dissertations
Published: 2020
Online Access:https://scholarbank.nus.edu.sg/handle/10635/182158
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-182158
record_format dspace
spelling sg-nus-scholar.10635-1821582020-11-19T13:57:20Z THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES DAVID KOH KHAR ANN ELECTRICAL ENGINEERING CHUA SOO JIN Master's MASTER OF ENGINEERING 2020-10-30T06:36:58Z 2020-10-30T06:36:58Z 1996 Thesis DAVID KOH KHAR ANN (1996). THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/182158 CCK BATCHLOAD 20201023
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description Master's
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
DAVID KOH KHAR ANN
format Theses and Dissertations
author DAVID KOH KHAR ANN
spellingShingle DAVID KOH KHAR ANN
THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES
author_sort DAVID KOH KHAR ANN
title THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES
title_short THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES
title_full THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES
title_fullStr THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES
title_full_unstemmed THE INFLUENCE OF A LAYER OF OXIDE ON ELECTROMIGRATION PERFORMANCE OF AL/CU/SI METAL LINES
title_sort influence of a layer of oxide on electromigration performance of al/cu/si metal lines
publishDate 2020
url https://scholarbank.nus.edu.sg/handle/10635/182158
_version_ 1686109158808485888