Novel CMOS-Compatible Mo-AlN-Mo Platform for Metamaterial-Based Mid-IR Absorber
10.1021/acsphotonics.6b00672
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
American Chemical Society (ACS)
2021
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/188861 |
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| Institution: | National University of Singapore |