Formation of air gap structures for inter-metal dielectric application

Formation of air gap structures for inter-metal dielectric application

US6251798

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Main Authors: SOO, CHOI PHENG, TEE, KHENG CHOK, ONG, KOK KENG, CHAN, LAP
Other Authors: MATERIALS SCIENCE
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32593
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Institution: National University of Singapore
id sg-nus-scholar.10635-32593
record_format dspace
spelling sg-nus-scholar.10635-325932015-07-29T07:03:43Z Formation of air gap structures for inter-metal dielectric application SOO, CHOI PHENG TEE, KHENG CHOK ONG, KOK KENG CHAN, LAP MATERIALS SCIENCE CHARTERED SEMICONDUCTOR MANUFACTURING COMPANY (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE (SINGAPORE, SG) NANYANG TECHNOLOGICAL UNIVERSITY OF SINGAPORE US6251798 Granted Patent 2012-05-02T02:27:31Z 2012-05-02T02:27:31Z 2001-06-26 Patent SOO, CHOI PHENG,TEE, KHENG CHOK,ONG, KOK KENG,CHAN, LAP (2001-06-26). Formation of air gap structures for inter-metal dielectric application. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32593 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US6251798
author2 MATERIALS SCIENCE
author_facet MATERIALS SCIENCE
SOO, CHOI PHENG
TEE, KHENG CHOK
ONG, KOK KENG
CHAN, LAP
format Patent
author SOO, CHOI PHENG
TEE, KHENG CHOK
ONG, KOK KENG
CHAN, LAP
spellingShingle SOO, CHOI PHENG
TEE, KHENG CHOK
ONG, KOK KENG
CHAN, LAP
Formation of air gap structures for inter-metal dielectric application
author_sort SOO, CHOI PHENG
title Formation of air gap structures for inter-metal dielectric application
title_short Formation of air gap structures for inter-metal dielectric application
title_full Formation of air gap structures for inter-metal dielectric application
title_fullStr Formation of air gap structures for inter-metal dielectric application
title_full_unstemmed Formation of air gap structures for inter-metal dielectric application
title_sort formation of air gap structures for inter-metal dielectric application
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32593
_version_ 1681081251738419200

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