Formation of air gap structures for inter-metal dielectric application
US6251798
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Main Authors: | SOO, CHOI PHENG, TEE, KHENG CHOK, ONG, KOK KENG, CHAN, LAP |
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Other Authors: | MATERIALS SCIENCE |
Format: | Patent |
Published: |
2012
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32593 |
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Institution: | National University of Singapore |
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