Formation of air gap structures for inter-metal dielectric application

• Main Authors: SOO, CHOI PHENG, TEE, KHENG CHOK, ONG, KOK KENG, CHAN, LAP
• Other Authors: MATERIALS SCIENCE
• Format: Patent
• Published: 2012
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/32593
• Institution: National University of Singapore

US6251798