Method for forming a shallow junction region using defect engineering and laser annealing

US7888224

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Bibliographic Details
Main Authors:	ONG, KUANG KIAN, YEONG, SAI HOOI, PEY, KIN LEONG, CHAN, LAP, CHONG, YUNG FU
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32789
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32789
record_format	dspace
spelling	sg-nus-scholar.10635-327892024-11-11T14:21:39Z Method for forming a shallow junction region using defect engineering and laser annealing ONG, KUANG KIAN YEONG, SAI HOOI PEY, KIN LEONG CHAN, LAP CHONG, YUNG FU ELECTRICAL & COMPUTER ENGINEERING CHEMICAL & BIOMOLECULAR ENGINEERING NANYANG TECHNOLOGICAL UNIVERSITY (SINGAPORE, SG) CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US7888224 Granted Patent 2012-05-02T02:30:26Z 2012-05-02T02:30:26Z 2011-02-15 Patent ONG, KUANG KIAN,YEONG, SAI HOOI,PEY, KIN LEONG,CHAN, LAP,CHONG, YUNG FU (2011-02-15). Method for forming a shallow junction region using defect engineering and laser annealing. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32789 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	US7888224
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING ONG, KUANG KIAN YEONG, SAI HOOI PEY, KIN LEONG CHAN, LAP CHONG, YUNG FU
format	Patent
author	ONG, KUANG KIAN YEONG, SAI HOOI PEY, KIN LEONG CHAN, LAP CHONG, YUNG FU
spellingShingle	ONG, KUANG KIAN YEONG, SAI HOOI PEY, KIN LEONG CHAN, LAP CHONG, YUNG FU Method for forming a shallow junction region using defect engineering and laser annealing
author_sort	ONG, KUANG KIAN
title	Method for forming a shallow junction region using defect engineering and laser annealing
title_short	Method for forming a shallow junction region using defect engineering and laser annealing
title_full	Method for forming a shallow junction region using defect engineering and laser annealing
title_fullStr	Method for forming a shallow junction region using defect engineering and laser annealing
title_full_unstemmed	Method for forming a shallow junction region using defect engineering and laser annealing
title_sort	method for forming a shallow junction region using defect engineering and laser annealing
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32789
_version_	1821199259586789376

Method for forming a shallow junction region using defect engineering and laser annealing

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