Fabrication of concave micro lens array using laser patterning and isotropic etching
10.1016/j.ijmachtools.2005.06.004
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2014
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sg-nus-scholar.10635-509202023-10-26T21:03:37Z Fabrication of concave micro lens array using laser patterning and isotropic etching Lim, C.S. Hong, M.H. Kumar, A.S. Rahman, M. Liu, X.D. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE Isotropic etching Laser patterning Lens sag Micro lens arrays 10.1016/j.ijmachtools.2005.06.004 International Journal of Machine Tools and Manufacture 46 5 552-558 IMTME 2014-04-24T07:21:13Z 2014-04-24T07:21:13Z 2006-04 Article Lim, C.S., Hong, M.H., Kumar, A.S., Rahman, M., Liu, X.D. (2006-04). Fabrication of concave micro lens array using laser patterning and isotropic etching. International Journal of Machine Tools and Manufacture 46 (5) : 552-558. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijmachtools.2005.06.004 08906955 http://scholarbank.nus.edu.sg/handle/10635/50920 000236504400010 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Isotropic etching Laser patterning Lens sag Micro lens arrays |
| spellingShingle |
Isotropic etching Laser patterning Lens sag Micro lens arrays Lim, C.S. Hong, M.H. Kumar, A.S. Rahman, M. Liu, X.D. Fabrication of concave micro lens array using laser patterning and isotropic etching |
| description |
10.1016/j.ijmachtools.2005.06.004 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Lim, C.S. Hong, M.H. Kumar, A.S. Rahman, M. Liu, X.D. |
| format |
Article |
| author |
Lim, C.S. Hong, M.H. Kumar, A.S. Rahman, M. Liu, X.D. |
| author_sort |
Lim, C.S. |
| title |
Fabrication of concave micro lens array using laser patterning and isotropic etching |
| title_short |
Fabrication of concave micro lens array using laser patterning and isotropic etching |
| title_full |
Fabrication of concave micro lens array using laser patterning and isotropic etching |
| title_fullStr |
Fabrication of concave micro lens array using laser patterning and isotropic etching |
| title_full_unstemmed |
Fabrication of concave micro lens array using laser patterning and isotropic etching |
| title_sort |
fabrication of concave micro lens array using laser patterning and isotropic etching |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/50920 |
| _version_ |
1781411632459546624 |