Fabrication of concave micro lens array using laser patterning and isotropic etching
10.1016/j.ijmachtools.2005.06.004
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Main Authors: | Lim, C.S., Hong, M.H., Kumar, A.S., Rahman, M., Liu, X.D. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/50920 |
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Institution: | National University of Singapore |
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