Fabrication of concave micro lens array using laser patterning and isotropic etching

• Main Authors: Lim, C.S., Hong, M.H., Kumar, A.S., Rahman, M., Liu, X.D.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Isotropic etching; Laser patterning; Lens sag; Micro lens arrays
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/50920
• Institution: National University of Singapore

10.1016/j.ijmachtools.2005.06.004