Fabrication of concave micro lens array using laser patterning and isotropic etching

Fabrication of concave micro lens array using laser patterning and isotropic etching

10.1016/j.ijmachtools.2005.06.004

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Bibliographic Details
Main Authors: Lim, C.S., Hong, M.H., Kumar, A.S., Rahman, M., Liu, X.D.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Isotropic etching
Laser patterning
Lens sag
Micro lens arrays
Online Access:http://scholarbank.nus.edu.sg/handle/10635/50920
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/50920

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