Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy

10.1016/S0168-583X(03)01022-X

Saved in:

Bibliographic Details
Main Authors:	Zmeck, M., Balk, L., Osipowicz, T., Watt, F., Phang, J., Khambadkone, A., Niedernostheide, F.-J., Schulze, H.-J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Electrical field strength High-power devices IBIC
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51212
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-51212
record_format	dspace
spelling	sg-nus-scholar.10635-512122024-11-14T01:01:02Z Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy Zmeck, M. Balk, L. Osipowicz, T. Watt, F. Phang, J. Khambadkone, A. Niedernostheide, F.-J. Schulze, H.-J. ELECTRICAL & COMPUTER ENGINEERING PHYSICS Electrical field strength High-power devices IBIC 10.1016/S0168-583X(03)01022-X Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 164-168 NIMBE 2014-04-24T08:36:33Z 2014-04-24T08:36:33Z 2003-09 Conference Paper Zmeck, M., Balk, L., Osipowicz, T., Watt, F., Phang, J., Khambadkone, A., Niedernostheide, F.-J., Schulze, H.-J. (2003-09). Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 : 164-168. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01022-X 0168583X http://scholarbank.nus.edu.sg/handle/10635/51212 000185352300031 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electrical field strength High-power devices IBIC
spellingShingle	Electrical field strength High-power devices IBIC Zmeck, M. Balk, L. Osipowicz, T. Watt, F. Phang, J. Khambadkone, A. Niedernostheide, F.-J. Schulze, H.-J. Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy
description	10.1016/S0168-583X(03)01022-X
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zmeck, M. Balk, L. Osipowicz, T. Watt, F. Phang, J. Khambadkone, A. Niedernostheide, F.-J. Schulze, H.-J.
format	Conference or Workshop Item
author	Zmeck, M. Balk, L. Osipowicz, T. Watt, F. Phang, J. Khambadkone, A. Niedernostheide, F.-J. Schulze, H.-J.
author_sort	Zmeck, M.
title	Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy
title_short	Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy
title_full	Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy
title_fullStr	Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy
title_full_unstemmed	Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy
title_sort	modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51212
_version_	1821182316365479936

Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy

Similar Items