A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner

10.1016/j.sna.2011.04.007

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Bibliographic Details
Main Authors:	Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Diffraction grating Micro scanners Micro-opto- electromechanical systems (MOEMS) Micro-resonators
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/53883
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-53883
record_format	dspace
spelling	sg-nus-scholar.10635-538832024-11-15T03:59:12Z A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. MECHANICAL ENGINEERING Diffraction grating Micro scanners Micro-opto- electromechanical systems (MOEMS) Micro-resonators 10.1016/j.sna.2011.04.007 Sensors and Actuators, A: Physical 168 2 253-261 SAAPE 2014-06-16T09:23:12Z 2014-06-16T09:23:12Z 2011-08-10 Article Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2011-08-10). A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner. Sensors and Actuators, A: Physical 168 (2) : 253-261. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2011.04.007 09244247 http://scholarbank.nus.edu.sg/handle/10635/53883 000291905200004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diffraction grating Micro scanners Micro-opto- electromechanical systems (MOEMS) Micro-resonators
spellingShingle	Diffraction grating Micro scanners Micro-opto- electromechanical systems (MOEMS) Micro-resonators Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
description	10.1016/j.sna.2011.04.007
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S.
format	Article
author	Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S.
author_sort	Du, Y.
title	A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
title_short	A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
title_full	A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
title_fullStr	A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
title_full_unstemmed	A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
title_sort	21.5 khz high optical resolution electrostatic double-layered vibratory grating laser scanner
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/53883
_version_	1821225049695191040

A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner

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