A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner

A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner

10.1109/JMEMS.2009.2023844

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Diffraction grating
Micro-opto-electromechanical systems
Microresonators
Microscanners
Online Access:http://scholarbank.nus.edu.sg/handle/10635/53885
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Institution: National University of Singapore
id sg-nus-scholar.10635-53885
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spelling sg-nus-scholar.10635-538852024-11-15T03:59:20Z A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner Du, Y. Zhou, G. Cheo, K.L. Zhang, Q. Feng, H. Chau, F.S. MECHANICAL ENGINEERING Diffraction grating Micro-opto-electromechanical systems Microresonators Microscanners 10.1109/JMEMS.2009.2023844 Journal of Microelectromechanical Systems 18 4 892-904 JMIYE 2014-06-16T09:23:14Z 2014-06-16T09:23:14Z 2009 Article Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S. (2009). A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner. Journal of Microelectromechanical Systems 18 (4) : 892-904. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2009.2023844 10577157 http://scholarbank.nus.edu.sg/handle/10635/53885 000268641700015 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Diffraction grating
Micro-opto-electromechanical systems
Microresonators
Microscanners
spellingShingle Diffraction grating
Micro-opto-electromechanical systems
Microresonators
Microscanners
Du, Y.
Zhou, G.
Cheo, K.L.
Zhang, Q.
Feng, H.
Chau, F.S.
A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner
description 10.1109/JMEMS.2009.2023844
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Du, Y.
Zhou, G.
Cheo, K.L.
Zhang, Q.
Feng, H.
Chau, F.S.
format Article
author Du, Y.
Zhou, G.
Cheo, K.L.
Zhang, Q.
Feng, H.
Chau, F.S.
author_sort Du, Y.
title A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner
title_short A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner
title_full A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner
title_fullStr A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner
title_full_unstemmed A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner
title_sort 2-dof circular-resonator-driven in-plane vibratory grating laser scanner
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/53885
_version_ 1821216178520981504

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