A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner

10.1109/JMEMS.2009.2023844

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Bibliographic Details
Main Authors:	Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Diffraction grating Micro-opto-electromechanical systems Microresonators Microscanners
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/53885
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Institution:	National University of Singapore

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