A lamp thermoelectricity based integrated bake/chill system for photoresist processing

10.1016/j.ijheatmasstransfer.2006.07.016

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Main Authors:	Tay, A., Chua, H.T., Wu, X.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Lamp heating Microlithography Photoresist processing Temperature control Thermoelectricity
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54294
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54294
record_format	dspace
spelling	sg-nus-scholar.10635-542942024-11-14T02:32:25Z A lamp thermoelectricity based integrated bake/chill system for photoresist processing Tay, A. Chua, H.T. Wu, X. ELECTRICAL & COMPUTER ENGINEERING Lamp heating Microlithography Photoresist processing Temperature control Thermoelectricity 10.1016/j.ijheatmasstransfer.2006.07.016 International Journal of Heat and Mass Transfer 50 3-4 580-594 IJHMA 2014-06-16T09:29:36Z 2014-06-16T09:29:36Z 2007-02 Article Tay, A., Chua, H.T., Wu, X. (2007-02). A lamp thermoelectricity based integrated bake/chill system for photoresist processing. International Journal of Heat and Mass Transfer 50 (3-4) : 580-594. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijheatmasstransfer.2006.07.016 00179310 http://scholarbank.nus.edu.sg/handle/10635/54294 000243776400017 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Lamp heating Microlithography Photoresist processing Temperature control Thermoelectricity
spellingShingle	Lamp heating Microlithography Photoresist processing Temperature control Thermoelectricity Tay, A. Chua, H.T. Wu, X. A lamp thermoelectricity based integrated bake/chill system for photoresist processing
description	10.1016/j.ijheatmasstransfer.2006.07.016
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tay, A. Chua, H.T. Wu, X.
format	Article
author	Tay, A. Chua, H.T. Wu, X.
author_sort	Tay, A.
title	A lamp thermoelectricity based integrated bake/chill system for photoresist processing
title_short	A lamp thermoelectricity based integrated bake/chill system for photoresist processing
title_full	A lamp thermoelectricity based integrated bake/chill system for photoresist processing
title_fullStr	A lamp thermoelectricity based integrated bake/chill system for photoresist processing
title_full_unstemmed	A lamp thermoelectricity based integrated bake/chill system for photoresist processing
title_sort	lamp thermoelectricity based integrated bake/chill system for photoresist processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54294
_version_	1821206473806446592

A lamp thermoelectricity based integrated bake/chill system for photoresist processing

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