A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution

A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution

Journal of the Electrochemical Society

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Bibliographic Details
Main Authors: Jang, S.-A., Kim, Y.-B., Cho, B.-J., Kim, J.-C.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54339
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Institution: National University of Singapore
Description
Summary:Journal of the Electrochemical Society

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