A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution
Journal of the Electrochemical Society
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sg-nus-scholar.10635-543392015-04-05T21:54:21Z A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution Jang, S.-A. Kim, Y.-B. Cho, B.-J. Kim, J.-C. ELECTRICAL ENGINEERING Journal of the Electrochemical Society 144 8 2933-2940 JESOA 2014-06-16T09:30:04Z 2014-06-16T09:30:04Z 1997-08 Article Jang, S.-A.,Kim, Y.-B.,Cho, B.-J.,Kim, J.-C. (1997-08). A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution. Journal of the Electrochemical Society 144 (8) : 2933-2940. ScholarBank@NUS Repository. 00134651 http://scholarbank.nus.edu.sg/handle/10635/54339 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Journal of the Electrochemical Society |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Jang, S.-A. Kim, Y.-B. Cho, B.-J. Kim, J.-C. |
| format |
Article |
| author |
Jang, S.-A. Kim, Y.-B. Cho, B.-J. Kim, J.-C. |
| spellingShingle |
Jang, S.-A. Kim, Y.-B. Cho, B.-J. Kim, J.-C. A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution |
| author_sort |
Jang, S.-A. |
| title |
A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution |
| title_short |
A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution |
| title_full |
A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution |
| title_fullStr |
A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution |
| title_full_unstemmed |
A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution |
| title_sort |
mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/54339 |
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1681084296068071424 |