Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement
10.1109/TED.2005.864367
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2014
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sg-nus-scholar.10635-548652023-10-27T09:39:48Z Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement Hong, Y.D. Yeow, Y.T. Chim, W.K. Yan, J. Wong, K.M. ELECTRICAL & COMPUTER ENGINEERING Dopant profile extraction Interface traps Scanning capacitance microscopy (SCM) Semiconductor device modeling Simulation 10.1109/TED.2005.864367 IEEE Transactions on Electron Devices 53 3 499-506 IETDA 2014-06-17T02:36:25Z 2014-06-17T02:36:25Z 2006-03 Article Hong, Y.D., Yeow, Y.T., Chim, W.K., Yan, J., Wong, K.M. (2006-03). Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement. IEEE Transactions on Electron Devices 53 (3) : 499-506. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2005.864367 00189383 http://scholarbank.nus.edu.sg/handle/10635/54865 000235585700014 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Dopant profile extraction Interface traps Scanning capacitance microscopy (SCM) Semiconductor device modeling Simulation |
| spellingShingle |
Dopant profile extraction Interface traps Scanning capacitance microscopy (SCM) Semiconductor device modeling Simulation Hong, Y.D. Yeow, Y.T. Chim, W.K. Yan, J. Wong, K.M. Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement |
| description |
10.1109/TED.2005.864367 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Hong, Y.D. Yeow, Y.T. Chim, W.K. Yan, J. Wong, K.M. |
| format |
Article |
| author |
Hong, Y.D. Yeow, Y.T. Chim, W.K. Yan, J. Wong, K.M. |
| author_sort |
Hong, Y.D. |
| title |
Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement |
| title_short |
Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement |
| title_full |
Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement |
| title_fullStr |
Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement |
| title_full_unstemmed |
Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement |
| title_sort |
accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/54865 |
| _version_ |
1781412036610097152 |