An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives
10.1088/0960-1317/15/5/009
Saved in:
Main Authors: | Yang, J.P., Deng, X.C., Chong, T.C. |
---|---|
Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55008 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Development of a new microactuator for hard disk drives
by: Sun, Jun.
Published: (2008) -
A self-sensing thermal actuator incorporating micromirror for tracking mechanism of optical drive
by: Yang, J.P., et al.
Published: (2014) -
Development of CMOS MEMS thermal bimorph actuator for driving microlens
by: Koh, K.H., et al.
Published: (2014) -
Precisely rectilinear electro-thermal microactuator using a high-aspect ratio microstructured Si/SU-8 composite
by: Thubthimthong, Borriboon, et al.
Published: (2013) -
Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
by: Chen, B., et al.
Published: (2014)