Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects

Journal of Electronic Materials

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Bibliographic Details
Main Authors:	Chu, L.W., Chim, W.K., Pey, K.L., Yeo, J.Y.K., Chan, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Electromigration Interconnects Low-frequency noise Reliability Resistance Voids
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55330
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55330
record_format	dspace
spelling	sg-nus-scholar.10635-553302024-11-14T10:20:39Z Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects Chu, L.W. Chim, W.K. Pey, K.L. Yeo, J.Y.K. Chan, L. ELECTRICAL & COMPUTER ENGINEERING Electromigration Interconnects Low-frequency noise Reliability Resistance Voids Journal of Electronic Materials 30 12 1513-1519 JECMA 2014-06-17T02:41:52Z 2014-06-17T02:41:52Z 2001-12 Article Chu, L.W.,Chim, W.K.,Pey, K.L.,Yeo, J.Y.K.,Chan, L. (2001-12). Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects. Journal of Electronic Materials 30 (12) : 1513-1519. ScholarBank@NUS Repository. 03615235 http://scholarbank.nus.edu.sg/handle/10635/55330 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electromigration Interconnects Low-frequency noise Reliability Resistance Voids
spellingShingle	Electromigration Interconnects Low-frequency noise Reliability Resistance Voids Chu, L.W. Chim, W.K. Pey, K.L. Yeo, J.Y.K. Chan, L. Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects
description	Journal of Electronic Materials
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chu, L.W. Chim, W.K. Pey, K.L. Yeo, J.Y.K. Chan, L.
format	Article
author	Chu, L.W. Chim, W.K. Pey, K.L. Yeo, J.Y.K. Chan, L.
author_sort	Chu, L.W.
title	Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects
title_short	Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects
title_full	Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects
title_fullStr	Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects
title_full_unstemmed	Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects
title_sort	combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55330
_version_	1821191351118594048

Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects

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