Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

10.1016/S0169-4332(01)00391-9

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書目詳細資料
Main Authors:	Wang, H., Lin, J., Huan, C.H.A., Dong, P., He, J., Tang, S.H., Eng, W.K., Thong, T.L.J.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Article
出版:	2014
主題:	Carbon nanotubes Lithography Pattern PE-CVD SEM
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/55424
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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