Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation

Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation

10.1063/1.1487899

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Bibliographic Details
Main Authors: Chim, W.K., Wong, K.M., Teo, Y.L., Lei, Y., Yeow, Y.T.
Other Authors: SINGAPORE-MIT ALLIANCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55693
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Institution: National University of Singapore
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Summary:10.1063/1.1487899

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