Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation
10.1063/1.1487899
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Main Authors: | Chim, W.K., Wong, K.M., Teo, Y.L., Lei, Y., Yeow, Y.T. |
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Other Authors: | SINGAPORE-MIT ALLIANCE |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55693 |
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Institution: | National University of Singapore |
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