Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation
10.1063/1.1487899
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sg-nus-scholar.10635-556932023-10-25T22:59:22Z Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation Chim, W.K. Wong, K.M. Teo, Y.L. Lei, Y. Yeow, Y.T. SINGAPORE-MIT ALLIANCE ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1487899 Applied Physics Letters 80 25 4837-4839 APPLA 2014-06-17T02:46:02Z 2014-06-17T02:46:02Z 2002-06-24 Article Chim, W.K., Wong, K.M., Teo, Y.L., Lei, Y., Yeow, Y.T. (2002-06-24). Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation. Applied Physics Letters 80 (25) : 4837-4839. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1487899 00036951 http://scholarbank.nus.edu.sg/handle/10635/55693 000176275400051 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.1487899 |
| author2 |
SINGAPORE-MIT ALLIANCE |
| author_facet |
SINGAPORE-MIT ALLIANCE Chim, W.K. Wong, K.M. Teo, Y.L. Lei, Y. Yeow, Y.T. |
| format |
Article |
| author |
Chim, W.K. Wong, K.M. Teo, Y.L. Lei, Y. Yeow, Y.T. |
| spellingShingle |
Chim, W.K. Wong, K.M. Teo, Y.L. Lei, Y. Yeow, Y.T. Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation |
| author_sort |
Chim, W.K. |
| title |
Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation |
| title_short |
Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation |
| title_full |
Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation |
| title_fullStr |
Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation |
| title_full_unstemmed |
Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation |
| title_sort |
dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55693 |
| _version_ |
1781412173605502976 |