Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide
10.1063/1.1448672
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sg-nus-scholar.10635-557362023-10-31T20:06:21Z Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide Tan, W.L. Pey, K.L. Chooi, S.Y.M. Ye, J.H. Osipowicz, T. PHYSICS ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1448672 Journal of Applied Physics 91 5 2901-2909 JAPIA 2014-06-17T02:46:31Z 2014-06-17T02:46:31Z 2002-02-15 Article Tan, W.L., Pey, K.L., Chooi, S.Y.M., Ye, J.H., Osipowicz, T. (2002-02-15). Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide. Journal of Applied Physics 91 (5) : 2901-2909. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1448672 00218979 http://scholarbank.nus.edu.sg/handle/10635/55736 000174182400047 Scopus |
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Singapore Singapore |
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| description |
10.1063/1.1448672 |
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PHYSICS |
| author_facet |
PHYSICS Tan, W.L. Pey, K.L. Chooi, S.Y.M. Ye, J.H. Osipowicz, T. |
| format |
Article |
| author |
Tan, W.L. Pey, K.L. Chooi, S.Y.M. Ye, J.H. Osipowicz, T. |
| spellingShingle |
Tan, W.L. Pey, K.L. Chooi, S.Y.M. Ye, J.H. Osipowicz, T. Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide |
| author_sort |
Tan, W.L. |
| title |
Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide |
| title_short |
Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide |
| title_full |
Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide |
| title_fullStr |
Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide |
| title_full_unstemmed |
Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide |
| title_sort |
effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55736 |
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1781412181250670592 |