Effect of a titanium cap in reducing interfacial oxides in the formation of nickel silicide

10.1063/1.1448672

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Bibliographic Details
Main Authors: Tan, W.L., Pey, K.L., Chooi, S.Y.M., Ye, J.H., Osipowicz, T.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55736
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Institution: National University of Singapore
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