Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability
10.1063/1.2709948
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sg-nus-scholar.10635-562672024-11-10T18:35:56Z Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability Yu, X. Zhu, C. Yu, M. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2709948 Applied Physics Letters 90 10 - APPLA 2014-06-17T02:52:40Z 2014-06-17T02:52:40Z 2007 Article Yu, X., Zhu, C., Yu, M. (2007). Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability. Applied Physics Letters 90 (10) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2709948 00036951 http://scholarbank.nus.edu.sg/handle/10635/56267 000244791700100 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.2709948 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Yu, X. Zhu, C. Yu, M. |
| format |
Article |
| author |
Yu, X. Zhu, C. Yu, M. |
| spellingShingle |
Yu, X. Zhu, C. Yu, M. Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability |
| author_sort |
Yu, X. |
| title |
Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability |
| title_short |
Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability |
| title_full |
Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability |
| title_fullStr |
Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability |
| title_full_unstemmed |
Impact of nitrogen in HfON gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability |
| title_sort |
impact of nitrogen in hfon gate dielectric with metal gate on electrical characteristics, with particular attention to threshold voltage instability |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/56267 |
| _version_ |
1821183313941889024 |