Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement

10.1109/TED.2004.833590

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Bibliographic Details
Main Authors:	Hong, Y.D., Yeow, Y.T., Chim, W.-K., Wong, K.-M., Kopanski, J.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56325
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56325
record_format	dspace
spelling	sg-nus-scholar.10635-563252023-10-25T20:01:11Z Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement Hong, Y.D. Yeow, Y.T. Chim, W.-K. Wong, K.-M. Kopanski, J.J. ELECTRICAL & COMPUTER ENGINEERING 10.1109/TED.2004.833590 IEEE Transactions on Electron Devices 51 9 1496-1503 IETDA 2014-06-17T02:53:20Z 2014-06-17T02:53:20Z 2004-09 Article Hong, Y.D., Yeow, Y.T., Chim, W.-K., Wong, K.-M., Kopanski, J.J. (2004-09). Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement. IEEE Transactions on Electron Devices 51 (9) : 1496-1503. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2004.833590 00189383 http://scholarbank.nus.edu.sg/handle/10635/56325 000223480500019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/TED.2004.833590
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Hong, Y.D. Yeow, Y.T. Chim, W.-K. Wong, K.-M. Kopanski, J.J.
format	Article
author	Hong, Y.D. Yeow, Y.T. Chim, W.-K. Wong, K.-M. Kopanski, J.J.
spellingShingle	Hong, Y.D. Yeow, Y.T. Chim, W.-K. Wong, K.-M. Kopanski, J.J. Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement
author_sort	Hong, Y.D.
title	Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement
title_short	Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement
title_full	Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement
title_fullStr	Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement
title_full_unstemmed	Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement
title_sort	influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56325
_version_	1781781153035845632

Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement

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