Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors
10.1116/1.1518972
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2014
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sg-nus-scholar.10635-563962024-11-14T00:57:12Z Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors Chua, C.S. Chor, E.F. Goh, F. See, A. Chan, L. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1518972 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 6 2288-2294 JVTBD 2014-06-17T02:54:07Z 2014-06-17T02:54:07Z 2002-11 Article Chua, C.S., Chor, E.F., Goh, F., See, A., Chan, L. (2002-11). Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 (6) : 2288-2294. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1518972 0734211X http://scholarbank.nus.edu.sg/handle/10635/56396 000180307300021 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1116/1.1518972 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Chua, C.S. Chor, E.F. Goh, F. See, A. Chan, L. |
| format |
Article |
| author |
Chua, C.S. Chor, E.F. Goh, F. See, A. Chan, L. |
| spellingShingle |
Chua, C.S. Chor, E.F. Goh, F. See, A. Chan, L. Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors |
| author_sort |
Chua, C.S. |
| title |
Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors |
| title_short |
Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors |
| title_full |
Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors |
| title_fullStr |
Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors |
| title_full_unstemmed |
Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors |
| title_sort |
investigation of active si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/56396 |
| _version_ |
1821181029388386304 |