Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors

Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors

10.1116/1.1518972

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Bibliographic Details
Main Authors:	Chua, C.S., Chor, E.F., Goh, F., See, A., Chan, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56396
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

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