Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics

10.1063/1.3584856

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Bibliographic Details
Main Authors:	Liu, X., Liu, B., Low, E.K.F., Liu, W., Yang, M., Tan, L.-S., Teo, K.L., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56512
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-565122023-10-27T08:43:14Z Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics Liu, X. Liu, B. Low, E.K.F. Liu, W. Yang, M. Tan, L.-S. Teo, K.L. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.3584856 Applied Physics Letters 98 18 - APPLA 2014-06-17T02:55:26Z 2014-06-17T02:55:26Z 2011-05-02 Article Liu, X., Liu, B., Low, E.K.F., Liu, W., Yang, M., Tan, L.-S., Teo, K.L., Yeo, Y.-C. (2011-05-02). Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics. Applied Physics Letters 98 (18) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3584856 00036951 http://scholarbank.nus.edu.sg/handle/10635/56512 000290392300066 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.3584856
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Liu, X. Liu, B. Low, E.K.F. Liu, W. Yang, M. Tan, L.-S. Teo, K.L. Yeo, Y.-C.
format	Article
author	Liu, X. Liu, B. Low, E.K.F. Liu, W. Yang, M. Tan, L.-S. Teo, K.L. Yeo, Y.-C.
spellingShingle	Liu, X. Liu, B. Low, E.K.F. Liu, W. Yang, M. Tan, L.-S. Teo, K.L. Yeo, Y.-C. Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics
author_sort	Liu, X.
title	Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics
title_short	Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics
title_full	Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics
title_fullStr	Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics
title_full_unstemmed	Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics
title_sort	local stress induced by diamond-like carbon liner in algan/gan metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56512
_version_	1781781193998467072

Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics

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