Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics

• Main Authors: Liu, X., Liu, B., Low, E.K.F., Liu, W., Yang, M., Tan, L.-S., Teo, K.L., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/56512
• Institution: National University of Singapore

10.1063/1.3584856