Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor

10.1143/JJAP.47.2589

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Main Authors: Tan, K.-M., Liow, T.-Y., Lee, R.T.P., Zhu, M., Hoe, K.-M., Tung, C.-H., Balasubramanian, N., Samudra, G.S., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/56837
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spelling sg-nus-scholar.10635-568372023-10-26T07:29:35Z Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor Tan, K.-M. Liow, T.-Y. Lee, R.T.P. Zhu, M. Hoe, K.-M. Tung, C.-H. Balasubramanian, N. Samudra, G.S. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING Extended-Pi FinFET SiGe Source/drain Strained Tri-gate 10.1143/JJAP.47.2589 Japanese Journal of Applied Physics 47 4 PART 2 2589-2592 JAPND 2014-06-17T02:59:13Z 2014-06-17T02:59:13Z 2008-04-25 Article Tan, K.-M., Liow, T.-Y., Lee, R.T.P., Zhu, M., Hoe, K.-M., Tung, C.-H., Balasubramanian, N., Samudra, G.S., Yeo, Y.-C. (2008-04-25). Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor. Japanese Journal of Applied Physics 47 (4 PART 2) : 2589-2592. ScholarBank@NUS Repository. https://doi.org/10.1143/JJAP.47.2589 00214922 http://scholarbank.nus.edu.sg/handle/10635/56837 000255449100054 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Extended-Pi
FinFET
SiGe
Source/drain
Strained
Tri-gate
spellingShingle Extended-Pi
FinFET
SiGe
Source/drain
Strained
Tri-gate
Tan, K.-M.
Liow, T.-Y.
Lee, R.T.P.
Zhu, M.
Hoe, K.-M.
Tung, C.-H.
Balasubramanian, N.
Samudra, G.S.
Yeo, Y.-C.
Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor
description 10.1143/JJAP.47.2589
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Tan, K.-M.
Liow, T.-Y.
Lee, R.T.P.
Zhu, M.
Hoe, K.-M.
Tung, C.-H.
Balasubramanian, N.
Samudra, G.S.
Yeo, Y.-C.
format Article
author Tan, K.-M.
Liow, T.-Y.
Lee, R.T.P.
Zhu, M.
Hoe, K.-M.
Tung, C.-H.
Balasubramanian, N.
Samudra, G.S.
Yeo, Y.-C.
author_sort Tan, K.-M.
title Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor
title_short Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor
title_full Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor
title_fullStr Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor
title_full_unstemmed Novel extended-Pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor
title_sort novel extended-pi shaped silicon - germanium source/drain stressors for strain and performance enhancement in p-channel tri-gate fin-type field-effect transistor
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/56837
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