On control of resist film uniformity in the microlithography process
10.1016/j.conengprac.2003.12.001
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sg-nus-scholar.10635-568582023-10-31T07:47:41Z On control of resist film uniformity in the microlithography process Ho, W.K. Tay, A. Lee, L.L. Schaper, C.D. ELECTRICAL & COMPUTER ENGINEERING Generalized predictive control Photoresist processing Semiconductor manufacturing Temperature control 10.1016/j.conengprac.2003.12.001 Control Engineering Practice 12 7 881-892 COEPE 2014-06-17T02:59:27Z 2014-06-17T02:59:27Z 2004-07 Article Ho, W.K., Tay, A., Lee, L.L., Schaper, C.D. (2004-07). On control of resist film uniformity in the microlithography process. Control Engineering Practice 12 (7) : 881-892. ScholarBank@NUS Repository. https://doi.org/10.1016/j.conengprac.2003.12.001 09670661 http://scholarbank.nus.edu.sg/handle/10635/56858 000221433000010 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Generalized predictive control Photoresist processing Semiconductor manufacturing Temperature control |
| spellingShingle |
Generalized predictive control Photoresist processing Semiconductor manufacturing Temperature control Ho, W.K. Tay, A. Lee, L.L. Schaper, C.D. On control of resist film uniformity in the microlithography process |
| description |
10.1016/j.conengprac.2003.12.001 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ho, W.K. Tay, A. Lee, L.L. Schaper, C.D. |
| format |
Article |
| author |
Ho, W.K. Tay, A. Lee, L.L. Schaper, C.D. |
| author_sort |
Ho, W.K. |
| title |
On control of resist film uniformity in the microlithography process |
| title_short |
On control of resist film uniformity in the microlithography process |
| title_full |
On control of resist film uniformity in the microlithography process |
| title_fullStr |
On control of resist film uniformity in the microlithography process |
| title_full_unstemmed |
On control of resist film uniformity in the microlithography process |
| title_sort |
on control of resist film uniformity in the microlithography process |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/56858 |
| _version_ |
1781781294217166848 |