Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate

10.1063/1.2222343

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Bibliographic Details
Main Authors:	Balakumar, S., Tung, C.H., Lo, G.Q., Kumar, R., Balasubramanian, N., Kwong, D.L., Fei, G., Lee, S.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57442
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-574422023-10-26T10:01:35Z Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate Balakumar, S. Tung, C.H. Lo, G.Q. Kumar, R. Balasubramanian, N. Kwong, D.L. Fei, G. Lee, S.J. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2222343 Applied Physics Letters 89 3 - APPLA 2014-06-17T03:06:14Z 2014-06-17T03:06:14Z 2006 Article Balakumar, S., Tung, C.H., Lo, G.Q., Kumar, R., Balasubramanian, N., Kwong, D.L., Fei, G., Lee, S.J. (2006). Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate. Applied Physics Letters 89 (3) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2222343 00036951 http://scholarbank.nus.edu.sg/handle/10635/57442 000239174100052 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.2222343
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Balakumar, S. Tung, C.H. Lo, G.Q. Kumar, R. Balasubramanian, N. Kwong, D.L. Fei, G. Lee, S.J.
format	Article
author	Balakumar, S. Tung, C.H. Lo, G.Q. Kumar, R. Balasubramanian, N. Kwong, D.L. Fei, G. Lee, S.J.
spellingShingle	Balakumar, S. Tung, C.H. Lo, G.Q. Kumar, R. Balasubramanian, N. Kwong, D.L. Fei, G. Lee, S.J. Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate
author_sort	Balakumar, S.
title	Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate
title_short	Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate
title_full	Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate
title_fullStr	Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate
title_full_unstemmed	Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate
title_sort	solid phase epitaxy during ge condensation from amorphous sige layer on silicon-on-insulator substrate
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57442
_version_	1781781413390974976

Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate

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