Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate
10.1063/1.2222343
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Main Authors: | Balakumar, S., Tung, C.H., Lo, G.Q., Kumar, R., Balasubramanian, N., Kwong, D.L., Fei, G., Lee, S.J. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/57442 |
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Institution: | National University of Singapore |
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