Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack

Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack

Materials Research Society Symposium Proceedings

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Bibliographic Details
Main Authors: Gao, F., Lee, S.J., Li, R., Balakumar, S., Tung, C.-H., Chi, D.-Z., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84160
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/84160

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